Clean room technology

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e-chain® for the clean room put to the test

The clean room confronts specially high demands on the abrasion resistance of the moving components. The energy supply systems of the Series E6 and E14 have been tested by the Fraunhofer Institute for Production Technology and Automation (IPA) in the department of clean and micro-production.
The result:
According to VDI 2083 page 8 (clean room capability of equipment), the tested energy supply chains of the Series E6 can be used in travel speeds of v = 1 m/s and v=2 m/s in clean rooms of the ISO Class 3 (according to DINE EN ISO 146441-1). The Series E14 energy chain is suitable for a travel speed of 1 m/s even in clean rooms of the ISO Class 2. Of particular interest in the very convincing result is that the four tested designs are igus® standard versions, not products made of special materials.
This test result offers the potential to supply the best possible product for individual customer requirements with the internationally approved qualification certificate.

Brooks Automation Inc. is a worldwide provider of completely integrated automation solutions for the semiconductor industry.

Brooks - Fixload

igus® energy supply systems in the clean room of the customer company Brooks

The company Brooks needs especially clean air in the production of its Fixload. This is due to the very sensitive application area of the load interface for 300 mm wafer processing equipment in the semiconductor manufacturing. As the wafers to be processed are exposed to the environment while loading, the clean room capability of the used energy supply system is, among others, very important here.

Tests by Brooks have shown that wearout of the igus® energy supply system was not determined even in the long-term test. A Zipper e-chain® is used in hanging installation position. At a travel distance of 290 mm, a number of 50-60 cycles per hour is attained mostly in the three-shift operation.

Other advantage:
The patented zipper system enables a filling with energy cables at lightning speed and additional protection. This increases the operating safety and the holding times.